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Galvanic Etching of Silicon

For Fabrication of Micromechanical Structures

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IOS Press is an international science, technical and medical publisher of high-quality books for academics, scientists, and professionals in all fields. Some of the areas we publish -Biomedicine-Oncology-Artificial intelligence-Databases and information systems-Maritime engineering-Nanotechnology-Geoengineering-All aspects of physics-E-governance-E-commerce-The knowledge economy-Urban studies-Arms control-Understanding and responding to terrorism-Medical informatics-Computer Sciences

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Galvanic Etching of Silicon, Colin M. A. Ashruf

Idioma
Publicado en
2000
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Título
Galvanic Etching of Silicon
Subtítulo
For Fabrication of Micromechanical Structures
Idioma
Inglés
Editorial
IOS Press
Publicado en
2000
Formato
Tapa blanda
Páginas
157
ISBN10
9040720010
ISBN13
9789040720017
Serie
Descripción
IOS Press is an international science, technical and medical publisher of high-quality books for academics, scientists, and professionals in all fields. Some of the areas we publish -Biomedicine-Oncology-Artificial intelligence-Databases and information systems-Maritime engineering-Nanotechnology-Geoengineering-All aspects of physics-E-governance-E-commerce-The knowledge economy-Urban studies-Arms control-Understanding and responding to terrorism-Medical informatics-Computer Sciences