Low-Energy Ion Irradiation of Materials

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Focusing on low-energy ion-solid interactions, this book covers fundamental principles and advanced applications in materials science. It addresses key topics like interaction potentials, binary collision kinetics, and radiation damage, while also incorporating the latest research on thin-film deposition, ion beam figuring, and nanostructure generation. With nearly two decades of advancements, it serves as a valuable resource for graduate students and professionals in academia and industry, providing comprehensive insights into this evolving field.