These proceedings focus on the technology application driving forces for multichamber approaches to semiconductor process sequences, otherwise called cluster tools or integrated processing and present research results upon which these manufacturing technologies are built.
The 14 papers in this volume cover topics such as the background to this approach and up-dated status; design and concepts of relevant cluster tools equipment; specific process modules such as deposition chambers (CVD, RTCVD, UVCVD) annealing or etching reactors; and standardization efforts.