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Alexey Ivanov

    Silicon anodization as a structuring technique
    • Silicon anodization as a structuring technique

      • 348 páginas
      • 13 horas de lectura

      Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. ​

      Silicon anodization as a structuring technique