Microsystem Technology and Microrobotics

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Focusing on the integration of tiny mechanical, electronic, and optical components, this book serves as a foundational introduction to microsystem technology (MST). It covers essential topics like microfabrication, microactuators, and microsensors, while also discussing the development and testing of microsystems. Additionally, it surveys existing products and experimental innovations, providing a thorough overview of advancements in MST devices and robotics, making it an invaluable resource for students, engineers, and scientists alike.