Precision Nanometrology

Focusing on the emerging field of precision nanometrology, this book explores its critical role in nanoscale manufacturing, particularly in semiconductors and optical components. It details optical sensors essential for measuring angles and displacements, followed by an examination of various scanning-type measurement systems for assessing surface forms and stage motions. Key topics include error separation algorithms, micro-aspheric measurement, and scanning probe microscopy. The text serves as a valuable resource for researchers and engineers in precision engineering and nanotechnology.