Process development for nanostructuring and 3D micro/nanointegration

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Focusing on the development of processes for replicating micro and nanostructures, this work addresses the challenge of integrating these functional structures into micro devices. It explores methods for achieving precise patterning in three dimensions and enhancing surface properties to meet specific application needs. The research highlights the significant impact of micro- and nanostructures on the physical and chemical characteristics of surfaces, paving the way for advanced functionalization techniques.