Mechanical resonator for hermeticity evaluation of RF MEMS waferlevel packages

Focusing on the evaluation of hermeticity in microsystems, this master's thesis presents comprehensive test standards crucial for ensuring the reliability and performance of electronic components. It discusses methodologies and criteria for assessing the integrity of micro-packages, highlighting the significance of hermetic sealing in various applications. The research conducted at the University of Applied Sciences Berlin underscores the importance of these standards in the field of electrotechnology, aiming to enhance the durability and functionality of microsystems.